OAK

Efficient electrochemical etching method to fabricate sharp metallic tips for scanning probe microscopes

Metadata Downloads
Author(s)
Kim, Pilkyu; Kim, Jun Ho; Jeong, Mun Seok; Ko, Do Kyeong; Lee, Jongmin; Jeong, Sungho
Type
Article
Citation
Review of Scientific Instruments, v.77, no.10
Issued Date
2006-10
Abstract
A new technique based on electrochemical etching for the fabrication of sharp metallic tips for scanning probe microscopes is introduced. In the proposed method, a small Teflon mass is attached to the end of an immersed tungsten wire using an aluminum tape, which leads to a significant enhancement of yield rate of sharp tungsten tips with an apex size below 100 nm to over 60%. The functionality of the tungsten tips fabricated by the proposed method is verified by measuring the topography of a standard sample using a shear-force scanning probe microscope. (c) 2006 American Institute of Physics.
Publisher
American Institute of Physics
ISSN
0034-6748
DOI
10.1063/1.2358703
URI
https://scholar.gist.ac.kr/handle/local/17825
공개 및 라이선스
  • 공개 구분공개
파일 목록
  • 관련 파일이 존재하지 않습니다.

Items in Repository are protected by copyright, with all rights reserved, unless otherwise indicated.