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Direct writing of carbon nanotube patterns by laser-induced chemical vapor deposition on a transparent substrate

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Abstract
Dot array and line patterns of multi-walled carbon nanotubes (MWCNTs) were successfully grown by laser-induced chemical vapor deposition (LCVD) on a transparent substrate at room temperature. In the proposed technique, a Nd:YVO(4) laser with a wavelength of 532 nm irradiates the backside of multiple catalyst layers (Ni/Al/Cr) through a transparent substrate to induce a local temperature rise, thereby allowing the direct writing of dense dot and line patterns of MWCNTs below 10 mm in size to be produced with uniform density on the controlled positions. In this LCVD method, a multiple-catalyst-layer with a Cr thermal layer is the central component for enabling the growth of dense MWCNTs with good spatial resolution. (C) 2008 Elsevier B.V. All rights reserved.
Author(s)
Park, J. B.Jeong, Mun SeokJeong, Sungho
Issued Date
2009-02
Type
Article
DOI
10.1016/j.apsusc.2008.11.070
URI
https://scholar.gist.ac.kr/handle/local/17174
Publisher
ELSEVIER SCIENCE BV
Citation
APPLIED SURFACE SCIENCE, v.255, no.8, pp.4526 - 4530
ISSN
0169-4332
Appears in Collections:
Research Institutes > 1. Journal Articles
Department of Mechanical and Robotics Engineering > 1. Journal Articles
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