Development of a Backscattering Type Ultraviolet Apertureless Near-Field Scanning Optical Microscope

Abstract

A backscattering type ultraviolet apertureless near-field scanning optical microscope (ANSOM) for the correlated measurement of topographical and optical characteristics of photonic materials with high optical resolution was developed. The near-field Rayleigh scattering image of GaN covered with periodic submicron Cr dots showed that optical resolution around 40 nm was achievable. By measuring the tip scattered photoluminescence of InGaN/GaN multi quantum wells, the applicability of the developed microscope for high resolution fluorescence measurement was also demonstrated.