GIST Scholar
College of Engineering
Department of Mechanical and Robotics Engineering
1. Journal Articles
Reliability evaluation of MEMS scanning mirrors with an embedded mirror-monitoring sensor under external random vibrations
- Type
- Article
- Citation
- MICRO AND NANO SYSTEMS LETTERS, v.14, no.1
- Issued Date
- 2026-02
- Abstract
- We propose a quantitative metric, the Index of Vibration Influence (IVI), to assess how external random vibrations affect resonant MEMS scanning mirrors that embed a mirror-angle sensor. The setup excites the mirror with PSD-specified random profiles while the mirror is driven near its resonant frequency. The IVIo, which quantifies vibration-induced scan-angle perturbations, is defined at the operating frequency (f(o)), as the ratio of the mirror-angle spectra influenced by external vibration to those without random vibration. We validate the linearity error of the embedded sensor as small as 1.25% compared with an external PSM. Using the validated sensor, IVIo was evaluated at - 45 dB, corresponding to 0.17 degrees angle perturbations at 30.18 degrees OSA, when random vibration was applied at an acceleration level 30% higher in RMS than the IEC 62,498-3 requirement.
- Publisher
- SPRINGERNATURE
- ISSN
- 2213-9621
- Appears in Collections:
- Department of Mechanical and Robotics Engineering > 1. Journal Articles
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