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Ultrathin infrared bolometric photodetector based on MoTe2

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Abstract
A fast thermal response time is crucial as it directly influences imaging speed and sensitivity. This is particularly important for military applications, such as night vision systems, where precise temperature measurement and high thermal contrast are required. While quantum-type sensors provide rapid detection, their use of hazardous materials and high costs restrict their industrial use. In contrast, bolometers are more cost-effective but have slower response times and face difficulties maintaining absorption rates as thickness decreases. Our study introduces an innovative approach featuring a simple design and an ultra-thin bolometer with over twice the thinness and an impressive absorption efficiency, achieved using materials with high absorption coefficients like TiN and Fabry-Perot resonance. The proposed structure includes a thermoresistive sensing layer (MoTe2-2H, 11 nm), a leakage current blocking layer (HfO2, 10 nm), and infrared absorption layers (TiN, 10 nm). We measured the temperature coefficient of resistance (TCR) of the suspended MoTe2, with a TCR of -0.1 %K-1, which shows feasibility as a sensor. Additionally, we executed the photoresponse of the suspended MoTe2/HfO2/TiN, which needs to be additional fine tuning of the thickness due to leakage current. Our research aims to broaden the application of high-speed sensors based on 2D materials, addressing critical industry needs.
Author(s)
박정호
Issued Date
2025
Type
Thesis
URI
https://scholar.gist.ac.kr/handle/local/19869
Alternative Author(s)
Jeongho Park
Department
대학원 기계로봇공학부
Advisor
Seol, Jae Hun
Table Of Contents
List of Contents
Abstract (English) i
Abstract (Korean) ii
List of Contents iii
List of Tables vi
List of Figures vii
I. Introduction
1.1 Bolometer 1
1.2 2D materials 4
1.2.1 Transition metal dicalcogenides (TMDs) 4
1.3 Titanium nitride (TiN) 6
1.4 Objective 8
II. Sample Preparation and Measurement Method
2.1 Device fabrication 9
2.2 MoTe2 fabrication 10
2.2.1 Raman spectroscopy 11
2.2.2 X-ray photoelectron spectroscopy (XPS) 12
2.3 HfO2/TiN deposition 13
2.3.1 Atomic force microscopy (AFM) 14
2.3.2 Transmission electron microscopy (TEM) 15
2.3.3 Fourier-transform infrared spectroscopy (FT-IR) 17
2.4 Micro-blade patterning 18
2.4.1 2D material transfer setup 19
2.5 Dry transfer 20
2.5.1 Nitrocellulose (NC) strip transfer 21
2.5.2 Critical point dryer (CPD) 22
2.6 Resistance measurement 23
2.6.1 Electrical setup 24
2.6.2 IR setup 25
III. Results and Discussion
3.1 TCR of suspended thin MoTe2 26
3.2 Photoresponse 28
IV. Conclusion
4.1 Summary 29
4.2 Future work 30
References 32
Degree
Master
Appears in Collections:
Department of Mechanical and Robotics Engineering > 3. Theses(Master)
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