디지털마이크로미터소자를 동적마스크 패턴생성기로 응용한 마이크로광조형

Abstract

In order to increase the productivity of conventional microstereolithography, a new method using a digital micromirror device (DMDTM) as the dynamic patter generator is proposed. The deviation from the level of clear optical images to the level of photopolymer surface is a key for the fabrication of an accurate 3D structure, so this deviation is minimized by controlling the viscosity of FA1260T with organic solvents. After finding the appropriate process variables, the feasibility of microstructure fabrication such as a microgear and a microsphere is demonstrated. Microstereolithography with DMDTM showed the potential to replace the existing focused beam microstereolithography.