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GIST Scholar Research Institutes 1. Journal Articles

High-Speed femtosecond Laser micromachining with a Scanner

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Author(s)
Sohn, Ik-Bu; Sung-Chul Choi; Noh, Young-Chul; Ko, Do Kyeong; Jongmin Lee
Type
Article
Citation
Journal of Korean Society of Laser Processing, v.9, no.2, pp.11 - 15
Issued Date
2006-09
Abstract
We report experimental results on the high-speed micromachining using a femtosecond laser (800 ㎚ 130 fs, 1㎑) and galvanometer scanner system (Raylase, Germany). Periodic hole drilling of silicon and glass with the scan speed of 1-20 ㎜/s is demonstrated. Finally, we demonstrate the utility of the femtosecond laser application to ITO patterning by using a high-speed femtosecond laser scanner system.
Publisher
Optical Society of Korea
URI
https://scholar.gist.ac.kr/handle/local/17832
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