High-Speed femtosecond Laser micromachining with a Scanner

Abstract

We report experimental results on the high-speed micromachining using a femtosecond laser (800 ㎚ 130 fs, 1㎑) and galvanometer scanner system (Raylase, Germany). Periodic hole drilling of silicon and glass with the scan speed of 1-20 ㎜/s is demonstrated. Finally, we demonstrate the utility of the femtosecond laser application to ITO patterning by using a high-speed femtosecond laser scanner system.