A micromachined friction meter for silicon sidewalls with consideration of contact surface shape

Abstract

A friction meter with consideration of contact surface shape is proposed for the evaluation of the static and dynamic friction coefficients on the sidewalls of micromachined structures. In order to validate the proposed friction measurement method, a friction meter for sidewalls was designed employing simple beam springs with holding and driving comb actuators fabricated using a silicon deep reactive ion etching process. In experiments to assess the meter, a shuttle was placed at a certain position by the driving actuator, and a symmetric normal holding force was subsequently applied to the sidewalls of the shuttle. After increasing the driving voltage with a ramp slope, the sliding distance was measured so as to determine the static and dynamic friction coefficients with consideration of the spring nonlinearity. To characterize the suggested friction meter, experiments were performed to investigate the effects of the normal force and the contact surface shape on friction coefficients by varying the contact widths and the number of contact points. The results indicate that the friction coefficients increased with the normal holding force, whereas the contact surface shape did not show a noticeable effect on the friction coefficients.