Formation of Void Array Inside Transparent and Absorptive Glasses by Femtosecond Laser Irradiation

Abstract

We demonstrate self-fabrication of void arrays in a fused silica transparent in the visible and a color-filter borosilicate glass strongly absorptive at 800 nm using tightly focused Ti-sapphire femtosecond laser pulses at 1 kHz without scanning. The period, the size, the number of voids, and the length of the aligned void structure were controlled by changing the laser pulse energy, and the position of the focal point inside two materials. The void arrays were observed by an optical microscope and also estimated by an optical diffraction experiment. The void size and period were smaller in the absorptive glass than in the transparent glass. The submicrometer-sized void was observed by a scanning electron microscope. The smaller and clearer void arrays were formed in the color filter than the fused silica glass. With increasing the laser focal depth, the void-array length increased in the fused silica and decreased in the color filter.