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GIST Scholar College of Life Sciences and Medical Engineering Department of Life Sciences 1. Journal Articles

Large-Area Fabrication of Periodic Sub-15 nm-Width Single-Layer Graphene Nanorings

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Author(s)
Pak, Yusin; Jeong, Huisu; Lee, Kwang-Ho; Song, Hui; Kwon, Taehyeon; Park, Jungsu; Park, Woojin; Jeong, Mun-Seok; Lee, Takhe; Seo, Sunae; Jung, Gun-Young
Type
Article
Citation
ADVANCED MATERIALS, v.25, no.2, pp.199 - 204
Issued Date
2013-01
Abstract
A periodically aligned array of graphene nanorings (GRNRs) with a sub-15 nm linewidth at a pitch of 450 nm is fabricated with a large area, 9 cm 2, through conventional nanoimprint lithography coupled with sophisticated metal deposition and plasma-etching processes. The existence of the single-layer GRNRs is verified by various techniques. © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Publisher
United Nations Industrial Developement Organization
ISSN
0935-9648
DOI
10.1002/adma.201202626
URI
https://scholar.gist.ac.kr/handle/local/15696
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