An accuracy improvement method for the topology measurement of an atomic force microscope using a 2D wavelet transform

Abstract

The topology image is constructed from the 2D matrix (XY directions) of heights Z captured from the force-feedback loop controller. For small height variations, nonlinear effects such as hysteresis or creep of the PZT-driven Z nano scanner can be neglected and its calibration is quite straightforward. For large height variations, the linear approximation of the PZT-driven Z nano scanner fail and nonlinear behaviors must be considered because this would cause inaccuracies in the measurement image. In order to avoid such inaccuracies, an additional strain gauge sensor is used to directly measure displacement of the PZT-driven Z nano scanner. However, this approach also has a disadvantage in its relatively low precision. In order to obtain high precision data with good linearity, we propose a method of overcoming the low precision problem of the strain gauge while its feature of good linearity is maintained. We expect that the topology image obtained from the strain gauge sensor showing significant noise at high frequencies. On the other hand, the topology image obtained from the controller output showing low noise at high frequencies. If the low and high frequency signals are separable from both topology images, the image can be constructed so that it is represented with high accuracy and low noise. In order to separate the low frequencies from high frequencies, a 2D Haar wavelet transform is used. Our proposed method use the 2D wavelet transform for obtaining good linearity from strain gauge sensor and good precision from controller output. The advantages of the proposed method are experimentally validated by using topology images. (c) 2018 Elsevier B.V. All rights reserved.