Femtosecond-laser fabrication of microfluidic filters

Abstract

We used femtosecond laser pulses to develope two micro-filters with a of T-shape for separating particles with sizes of 10 µm and 2 µm, and particles with sizes of 1 µm and 200 nm sizes. The diameters of the microchannels were controlled by using the laser intensity, scan speed, and scan number. A distributed profile of the particles injected into a channel was observed by using a confocal fluorescence microscope, and the filter function was studied by measuring the fluorescence spectra of the particles transmitted by a fabricated waveguide. We also observed the profile of the inner surface of the channel by using a scanning electron microscope and measured the change in the flow of the water along the channel. © 2019 The Korean Physical Society. All rights reserved.