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Surface micromachined silicon photonic MEMS: A scalable technology platform for photonic network components

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Author(s)
Quack, NielsSeok, Tae JoonHan, SangyoonSattari, HamedGraziosi, TeodoroKiss, MarcellMuller, Richard S.Wu, Ming C.
Type
Conference Paper
Citation
Photonic Networks and Devices, Networks 2018
Issued Date
2018-07-02
Abstract
Exploiting mechanical movement of surface micromachined waveguides on a passive silicon photonics platform provides scalable opportunities for efficient on-chip manipulation of optical signals in complex photonic integrated circuits for future photonic networks.
Publisher
OSA - The Optical Society
Conference Place
SZ
Zurich
URI
https://scholar.gist.ac.kr/handle/local/8501
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