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Enhanced remnant polarization in Hf0.5Zr0.5O2 capacitor by introducing transition metal dichalcogenides capping layer

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Author(s)
Lee, SoyeonLee, Sanghan
Issued Date
2024-01-24
Type
Conference Paper
URI
https://scholar.gist.ac.kr/handle/local/8251
Publisher
한국반도체산업협회/연구조합
Citation
제 31회 한국반도체학술대회
Conference Place
KO
경주화백컨벤션센터
Appears in Collections:
Department of Materials Science and Engineering > 2. Conference Papers
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