Characterization of Grazing Incidence Flat-field Extreme Ultraviolet Spectrometer

Abstract

The structure of grazing incidence flat-field spectrometer for extreme ultraviolet (EUV) region was presented here. To calibrate the energy measured by the spectrometer, carbon line emission generated by the interaction between Ti: sapphire laser and 75 μm thickness of carbon (graphite) target were used and with carbon line emission, the spectrometer can be verified that covering the energy spectrum range of 46.50 eV to 169.30 eV. Then, the resolution power of the spectrometer was obtained from the result of calibration. The resolution power shows that the grazing incidence flat-field spectrometer for the EUV region can be properly used to study warm dense matter (WDM).