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GIST Scholar College of Natural Sciences Department of Physics and Photon Science 2. Conference Papers

A Real-time X-ray Scattering Study of Sputtering Growth of TiN Films

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Author(s)
Je, J.H; NOH, DO YOUNG; Kim, Hong Kook; Liang, K.S
Type
Conference Paper
Citation
Proceedings of the 1994 MRS Fall Meeting, pp.0
Issued Date
1994-12-01
Publisher
MRS
Conference Place
US
URI
https://scholar.gist.ac.kr/handle/local/31023
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