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GIST Repository College of Engineering Department of Materials Science and Engineering 2. Conference Papers

Effect of Barrier layer on the Electrical and Reliability Characteristics of High-k gate dielectric films

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Author(s)
이병훈
Type
Conference Paper
Citation
, pp.707 - 710
Issued Date
1998-12-01
URI
https://scholar.gist.ac.kr/handle/local/30554
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