OAK

In-situ synchrotron x-ray scattering study of the formation of g-Al2O3 thin films from AlN

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Author(s)
노도영
Type
Conference Paper
Citation
First Joint Symposium between JASRI and PAL, pp.231 - 264
Issued Date
1999-01-01
Publisher
First Joint Symposium between JASRI and PAL
Conference Place
KO
URI
https://scholar.gist.ac.kr/handle/local/30519
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