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GIST Repository College of Information and Computing Department of Electrical Engineering and Computer Science 2. Conference Papers

Reactive Ion Etching of InP for Optoelectronic Device Applications : Comparison in CH4, CH4/Ar and CH4/H2 Gas

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Author(s)
이용탁
Type
Conference Paper
Issued Date
2000-01-01
URI
https://scholar.gist.ac.kr/handle/local/30292
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