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GIST Repository College of Information and Computing Department of Electrical Engineering and Computer Science 2. Conference Papers

Comparing Reactive Ion Etching of GaAs with Ar Addition in SiCl4 and CCl2F2 Discharges

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Author(s)
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Type
Conference Paper
Issued Date
2000-07-01
URI
https://scholar.gist.ac.kr/handle/local/30196
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