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GIST Scholar College of Engineering Department of Materials Science and Engineering 2. Conference Papers

Characteristics of TaN gate MOSFET with ultrathin hafnium oxide (8Å-12Å)

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Author(s)
이병훈
Type
Conference Paper
Citation
, pp.61 - 64
Issued Date
2000-12-01
URI
https://scholar.gist.ac.kr/handle/local/30074
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