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GIST Scholar College of Natural Sciences Department of Physics and Photon Science 2. Conference Papers

구리배선용 베리어메탈로 쓰이는 Ta-N/Ta/Si (001) 박막에 관한 X-선 산란연구

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Author(s)
노도영
Type
Conference Paper
Citation
한국전기전자재료 학회, pp.0
Issued Date
2001-01-01
Publisher
한국전기전자재료 학회
Conference Place
KO
URI
https://scholar.gist.ac.kr/handle/local/30037
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