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GIST Scholar College of Natural Sciences Department of Physics and Photon Science 2. Conference Papers

Synchrotron x-ray scattering study on oxidation of epitaxial AlN films on sapphire(0001), Si(001) and Si(111) substrates

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Author(s)
H. C. Kang; S. H. Seo; J. W. Kim; NOH, DO YOUNG
Type
Conference Paper
Citation
한국진공학회 춘계학술대회
Issued Date
2001-01-01
Publisher
한국진공학회
Conference Place
KO
URI
https://scholar.gist.ac.kr/handle/local/30030
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