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GIST Scholar College of Information and Computing Department of Electrical Engineering and Computer Science 2. Conference Papers

Reactive Ion Etching of InP and InGaP using Cl2 gas with CH4 and Ar Addition

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Author(s)
이용탁
Type
Conference Paper
Issued Date
2001-02-01
URI
https://scholar.gist.ac.kr/handle/local/29960
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