OAK

MCVD방법을 이용하여 F와 Ge가 함께 첨가된 porous layer 형성 시 GeCl4 및 SiCl4 의 유량이 굴절률 변화에 미치는 영향

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Author(s)
한원택
Type
Conference Paper
Citation
, pp.365 - 366
Issued Date
2002-05-15
URI
https://scholar.gist.ac.kr/handle/local/29507
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