Fabrication of Si3N4 Film Covered Si Planar Near-field Optical Probe: A Nano-slide Integrated Nano-probe
- Type
- Conference Paper
- Citation
- The 7th Int’l Conference on Near-field Optics and Related Techniques (NFO-7), pp.249
- Issued Date
- 2002-08-13
- Publisher
- NFO
- Conference Place
- US
Rochester
- Appears in Collections:
- ETC > 2. Conference Papers
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