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Performance enhancement on sub-70nm strained silicon SOI MOSFETs on Ultra-thin Thermally Mixed Strained silicon/SiGe on Insulator(TM-SGOI) substrate w

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Author(s)
이병훈
Type
Conference Paper
Citation
, pp.946 - 947
Issued Date
2002-12-01
URI
https://scholar.gist.ac.kr/handle/local/29313
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