OAK

Fast gap detection of non-contact type AFM using a square-law demodulator

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Author(s)
박기환
Issued Date
2004-09-01
Type
Conference Paper
URI
https://scholar.gist.ac.kr/handle/local/28556
Citation
3rd IFAC Symposium on Mechatronic Systems, pp.717 - 720
Appears in Collections:
Department of Mechanical and Robotics Engineering > 2. Conference Papers
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