OAK

Rotational Stability of the Electrostatic Comb Actuator for Large-stroke Driving

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Author(s)
Lee, Jong-Hyun
Type
Conference Paper
Citation
한국MEMS학술대회
Issued Date
2006-04
Publisher
마이크로나노시스템학회
Conference Place
KO
URI
https://scholar.gist.ac.kr/handle/local/27621
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