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GIST Scholar College of Engineering Department of Materials Science and Engineering 2. Conference Papers

Tetragonal Phase Stabilization by Doping as Enabler of Highly Thermally Stable HfO2 based MIM and MIS Capacitors for sub 50nm Deep Trench DRAM

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Author(s)
이병훈
Type
Conference Paper
Issued Date
2006-12-01
URI
https://scholar.gist.ac.kr/handle/local/27169
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