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Fabrication of periodic nano-holes on GaAs substrate by using AFM tip assisted oxidation and chemical wet etching

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Author(s)
KIM, JONG SUJEONG, MUN SEOKBYUN, JI SOODO, KYEONG KOJongmin Lee
Issued Date
2006-12-07
Type
Conference Paper
URI
https://scholar.gist.ac.kr/handle/local/27164
Publisher
International Workshop on Nano-Photonics
Citation
International Workshop on Nano-Photonics
Conference Place
JA
Appears in Collections:
Research Institutes > 2. Conference Papers
Department of Physics and Photon Science > 2. Conference Papers
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