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Fabrication of periodic nano-holes on GaAs substrate by using AFM tip assisted oxidation and chemical wet etching

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Author(s)
KIM, JONG SUJEONG, MUN SEOKBYUN, JI SOODO, KYEONG KOJongmin Lee
Type
Conference Paper
Citation
International Workshop on Nano-Photonics
Issued Date
2006-12-07
Publisher
International Workshop on Nano-Photonics
Conference Place
JA
URI
https://scholar.gist.ac.kr/handle/local/27164
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