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GIST Scholar College of Engineering Department of Mechanical and Robotics Engineering 2. Conference Papers

Fabrication of a Multi-Level Using Independent Exposure Lithography and FAB Plasma Etching

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Author(s)
이선규
Type
Conference Paper
Citation
IEEE/LEOS International Conference on Optical MEMS and Nano photonics
Issued Date
2007-08-12
Publisher
IEEE conference
Conference Place
CH
URI
https://scholar.gist.ac.kr/handle/local/26826
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