GIST Repository
College of Engineering
Department of Mechanical and Robotics Engineering
2. Conference Papers
Fabrication of a Multi-Level Using Independent Exposure Lithography and FAB Plasma Etching
- Publisher
- IEEE conference
- Citation
- IEEE/LEOS International Conference on Optical MEMS and Nano photonics
- Conference Place
- CH
- Appears in Collections:
- Department of Mechanical and Robotics Engineering > 2. Conference Papers
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