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A Photography-based Silicon Nanowire Fabrication using Undercut Etching of (110) Silicon Wafer for Biosensor Applications

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Author(s)
양성
Type
Conference Paper
Citation
The 11th International Conference on Miniaturized Systems for Chemistry Life Sciences, pp.0
Issued Date
2007-10-07
Conference Place
KO
Transducer Research Foundation
URI
https://scholar.gist.ac.kr/handle/local/26744
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