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GIST Scholar College of Natural Sciences Department of Physics and Photon Science 2. Conference Papers

The in-situ study of growth rate on silicon oxidations via ambient pressure XPS

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Author(s)
문봉진
Type
Conference Paper
Citation
한국진공학회 춘계학회
Issued Date
2008-02-14
Publisher
한국진공학회
Conference Place
KO
단국대학교 죽전
URI
https://scholar.gist.ac.kr/handle/local/26531
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