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GIST Repository College of Engineering Department of Mechanical and Robotics Engineering 2. Conference Papers

Optimization of Sawtooth Gratings by Using Scalar and Vector Analysis and Its fabrication by Fast Atom Beam Etching

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Author(s)
이선규
Type
Conference Paper
Citation
The 10th Korean MEMS Conference
Issued Date
2008-04-03
Publisher
The 10th Korean MEMS Conference
Conference Place
KO
URI
https://scholar.gist.ac.kr/handle/local/26499
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