GIST Scholar
College of Engineering
Department of Mechanical and Robotics Engineering
2. Conference Papers
Optimization of Sawtooth Gratings by Using Scalar and Vector Analysis and Its fabrication by Fast Atom Beam Etching
- Type
- Conference Paper
- Citation
- The 10th Korean MEMS Conference
- Issued Date
- 2008-04-03
- Publisher
- The 10th Korean MEMS Conference
- Conference Place
- KO
- Appears in Collections:
- Department of Mechanical and Robotics Engineering > 2. Conference Papers
- Files in This Item:
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