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GIST Scholar College of Engineering Department of Mechanical and Robotics Engineering 2. Conference Papers

볼 스크류 구동 스테이지의 나노 포지셔닝 제어

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Author(s)
이선규
Type
Conference Paper
Citation
KSPE 2008 SPRING CONFERENCE
Issued Date
2008-06-11
Publisher
한국정밀공학회
Conference Place
KO
URI
https://scholar.gist.ac.kr/handle/local/26355
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