OAK

진공용 초음파 리니어 모터의 강건 설계 및 제어

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Author(s)
이선규
Type
Conference Paper
Citation
KSPE 2008 AUTUMN CONFERENCE
Issued Date
2008-11-12
Publisher
한국정밀공학회
Conference Place
KO
URI
https://scholar.gist.ac.kr/handle/local/26052
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