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GIST Repository College of Engineering Department of Mechanical and Robotics Engineering 2. Conference Papers

Fabrication of small period blazed reflection grating by fast atom beam dry etching method

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Author(s)
이선규
Type
Conference Paper
Citation
The 4th SPIE International Symposium on Advanced Optical Manufacturing and Testing Technologies
Issued Date
2008-11-20
Publisher
AOMATT China
Conference Place
CC
URI
https://scholar.gist.ac.kr/handle/local/26035
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