GIST Repository
College of Engineering
Department of Mechanical and Robotics Engineering
2. Conference Papers
Fabrication of small period blazed reflection grating by fast atom beam dry etching method
- Publisher
- AOMATT China
- Citation
- The 4th SPIE International Symposium on Advanced Optical Manufacturing and Testing Technologies
- Conference Place
- CC
- Appears in Collections:
- Department of Mechanical and Robotics Engineering > 2. Conference Papers
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