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GIST Scholar College of Engineering Department of Mechanical and Robotics Engineering 2. Conference Papers

(110) 실리콘기판의 결정성 습식식각에 의해 제작된 in-plane 미세바늘 칩

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Author(s)
양성
Type
Conference Paper
Citation
The 11th Korean MEMS Conference, pp.3 - 4
Issued Date
2009-04-03
Publisher
한국 MEMS 학술대회 운영위원회
Conference Place
KO
한국 MEMS 학술대회 운영위원회
URI
https://scholar.gist.ac.kr/handle/local/25823
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