OAK

The in-situ study of growth rate on silicon oxidation via ambient pressure XPS

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Author(s)
문봉진
Type
Conference Paper
Citation
2009년 봄 학술논문발표회
Issued Date
2009-05-19
Publisher
한국물리학회
Conference Place
KO
대전
URI
https://scholar.gist.ac.kr/handle/local/25715
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