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GIST Scholar College of Engineering Department of Mechanical and Robotics Engineering 2. Conference Papers

XY-axis VCM fine stage의 진동 측정을 이용한 AFM의 분해능 향상

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Author(s)
박기환
Type
Conference Paper
Citation
한국소음진동공학회
Issued Date
2009-10-29
Publisher
한국소음진동공학회
Conference Place
KO
목포현대호텔
URI
https://scholar.gist.ac.kr/handle/local/25380
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