Vibration analysis and reduction technique of an AFM
- Author(s)
- 박기환
- Type
- Conference Paper
- Citation
- International Conference on Mechatronics and Information Technology, pp.243
- Issued Date
- 2009-11-04
- Publisher
- Institute of Control, Robotics and Systems
- Conference Place
- KO
- URI
- https://scholar.gist.ac.kr/handle/local/25350
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