OAK

Optical Microscanner with Vertical Combs Tilted by Microassembly Process

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Author(s)
이종현
Type
Conference Paper
Citation
제 12회 한국 MEMS 학술대회 , pp.227 - 228
Issued Date
2010-04-02
Publisher
한국 MEMS 학술대회 운영위원회
Conference Place
KO
부산 해운대 그랜드 호텔
URI
https://scholar.gist.ac.kr/handle/local/25103
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