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GIST Scholar College of Engineering Department of Mechanical and Robotics Engineering 2. Conference Papers

Simple PDMS double molding method for PDMS membrane with micro throughhole via CH4/He plasma surface treatment

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Author(s)
Yang, Sung; Jong chan choi; Sang Youl Yoon
Type
Conference Paper
Citation
KMEMS 2010, pp.373 - 374
Issued Date
2010-04-03
Publisher
KMEMS
Conference Place
KO
URI
https://scholar.gist.ac.kr/handle/local/25100
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