Nanoscale pattern fabrication on SiNx membrane for soft x-ray imaging
- Author(s)
- 정건영
- Type
- Conference Paper
- Citation
- The 21st International Conference on Molecular Electronics and Device
- Issued Date
- 2010-05-19
- Publisher
- International Conference on Molecular Electronics and Device
- Conference Place
- KO
- URI
- https://scholar.gist.ac.kr/handle/local/24985
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