OAK

Nanoscale pattern fabrication on SiNx membrane for soft x-ray imaging

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Author(s)
정건영
Type
Conference Paper
Citation
The 21st International Conference on Molecular Electronics and Device
Issued Date
2010-05-19
Publisher
International Conference on Molecular Electronics and Device
Conference Place
KO
URI
https://scholar.gist.ac.kr/handle/local/24985
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