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GIST Scholar College of Engineering Department of Mechanical and Robotics Engineering 2. Conference Papers

고진공 환경에서 하이브리드 타입 초음파 리니어 모터의 나노미터 모션제어

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Author(s)
이선규; 김완수; 이동진
Type
Conference Paper
Citation
대한 기계 학회 2010 춘계 학술대회
Issued Date
2010-05-26
Publisher
대한 기계 학회
Conference Place
KO
URI
https://scholar.gist.ac.kr/handle/local/24972
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