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GIST Scholar College of Engineering Department of Mechanical and Robotics Engineering 2. Conference Papers

기울어진 단차형 빗살전극을 가지는 광 마이크로 스캐너의 구동특성 측정

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Author(s)
이종현
Type
Conference Paper
Citation
2010년도 대한기계학회 동역학 및 제어부문 춘계학술대회, pp.314 - 315
Issued Date
2010-06-03
Publisher
대한기계학회
Conference Place
KO
광주과학기술원
URI
https://scholar.gist.ac.kr/handle/local/24942
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