GIST Repository
College of Engineering
Department of Mechanical and Robotics Engineering
2. Conference Papers
Fast atom beam-based fabrication of high-efficient blazed grating using slanting angle control ???? of a substrate
- Type
- Conference Paper
- Citation
- Optical MEMS and Nanophotonics 2010
- Issued Date
- 2010-08-09
- Publisher
- Optical MEMS and Nanophotonics
- Conference Place
- JA
- Appears in Collections:
- Department of Mechanical and Robotics Engineering > 2. Conference Papers
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