OAK

Multi-Points Method를 이용한 스테이지의 5자유도 운동 오차 측정 방법

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Author(s)
김규하이선규
Type
Conference Paper
Citation
한국 정밀 공학회
Issued Date
2010-11-10
Publisher
한국 정밀 공학회
Conference Place
KO
URI
https://scholar.gist.ac.kr/handle/local/24604
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