OAK

볼 스크류 스테이지의 나노 미터 정밀도 PTP(Point - to - Point)제어

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Author(s)
이선규
Type
Conference Paper
Citation
대한기계학회 2010 춘계 학술대회
Issued Date
2010-11-10
Publisher
대한 기계 학회
Conference Place
KO
URI
https://scholar.gist.ac.kr/handle/local/24603
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